Sensorless Manipulation Using Massively Parallel Microfabricated Actuator Arrays

This paper investigates manipulation tasks with arrays of microelectromechanical structures (MEMS). We develop a geometric model for the mechanics of microactuators and a theory of sensorless, parallel manipulation, and we describe e cient algorithms for their evaluation. The theory of limit surfaces o ers a purely geometric characterization of microscale contacts between actuator and moving object, which can be used to e ciently predict the motion of the object on an actuator array. It is shown how simple actuator control strategies can be used to uniquely align a part up to symmetry without sensor feedback. This theory is applicable to a wide range of microactuator arrays. Our actuators are oscillating structures of single-crystal silicon fabricated in a IC-compatible process. Calculations show that these actuators are strong enough to levitate and move e.g. a piece of paper.